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BUSINESS
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Chamber Cleaning
01. Chamber ³»ºÎ Diamond Pad »ç¿ëÀ¸·Î Chamber ³»ºÎ ¿À¿°¹°Á¦°Å Particle ¹®Á¦ ÇØ°á.
02. CVD. PVD. Etch. Diff. Implant. Photo. ¹ÝµµÃ¼ Àåºñ Chamber Wall Grinding ±â¼úÀûÀÎ ÀÛ¾÷À¸·Î ÀÎÇÑ Particle ¹®Á¦¸¦ ÇØ°áÇÏ°í Yield Çâ»ó.
03. Deposition ½Ã Particle Reduction À¸·Î ÀÎÇÑ Process ¾ÈÁ¤È­ ¹× High Tech Device
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GAS LINE Á¦ÀÛ
01. ¹ÝµµÃ¼ Á¦Á¶ °øÁ¤¿¡ »ç¿ëµÇ´Â ´Ù¾çÇÑ Á¾·ùÀÇ GAS LINE Á¦ÀÛÇÏ¿© ¼­ºñ½º¸¦ Á¦°øÇÕ´Ï´Ù.
02. ¾ÈÀü/°øÁ¤/Process°ü¸® ÇöÀå½ÇÃø ¹× ¸ÂÃã Á¦ÀÛÇÏ¿© ¼­ºñ½º¸¦ Á¦°øÇÕ´Ï´Ù.
03. GAS LINE clean room Á¦ÀÛ ¹× ÇöÀå Leak Test Particle ÃøÁ¤ & N2 purge ÇÏ¿© Á¦ÀÛÇÏ¿© ¼­ºñ½º¸¦ Á¦°øÇÕ´Ï´Ù.
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¹è°ü Hook up
01. ¹ÝµµÃ¼ °øÁ¤¿¡ »ç¿ëµÇ´Â ´Ù¾çÇÑ Á¾·ùÀÇ ¹è°üÀ» Á¦ÀÛÇÏ¿© ½Ã°ø ¼­ºñ½º¸¦ Á¦°øÇÕ´Ï´Ù.
02. Àü¹®Àη ÅõÀÔ ¹× ¸ÂÃã Á¦ÀÛÀ¸·Î À¯¿¬ÇÑ ´ëÀÀ ÇÏ¿© ¼­ºñ½º¸¦ Á¦°øÇÕ´Ï´Ù.
03. Heat Exchanger Line ¹è°ü°¡¼³ ãÁ ¹è°ü ¿¬°áºÎÀ§ ¿ëÁ¢ Type ÀÛ¾÷ÇÏ¿© Leak Point ÀÇ °¨¼Ò·Î ÀÎÇÑ ¾ÈÀü»ç°í À§ÇèÀÌ ¾ø½À´Ï´Ù.
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